The preparation of Al-doped ZnO thin films by spray pyrolysis technique for alcohol vapor sensor

Thin films of ZnO and Al-doped ZnO are deposited on glass wafer substrates using a compressed sprayer system with Zn(CH3COO)2.2H2O and AlCl3 as precursors. The influence of Al doping concentration on the crystal phase and morphology of the samples is investigated by XRD and SEM, respectively.